RayScan Nano
Exploring the Nano WorldThe RayScan Nano is a powerful tool for fully 3D CT, non-destructive structural and chemical characterization with highest spatial resolution.
The system includes a novel X-ray tube which provides ultra-small focal spots of highest luminosity and performance (ø < 150 nm). Combined with a super-precise object manipulation system and a photon counting, energy-sensitive flat panel detector this system allows spatial sampling from below 60 nm up to 10 µm.
RayScan Nano is perfectly suitable for the development, characterization and analysis of new materials in nanometer scale – e.g. integrated circuits, chips and samples from bio-engineering.
But also for classical metallurgic characterizations and for the optimization of manufacturing processes this system provides significantly improved results compared to recently available CT products.
RayScan Nano
Technical Data
X-ray source (optional) | Nanofocus 10 -80 kV | |
Focal spot | 0.15 μm - 1 μm | |
Size of objects (CT) | < 0.1 mm - 100 mm | |
Field of view (horizontal) | 200 μm - 35 mm | |
Detector´s active area | 30 mm x 185 mm | |
Number of detector-pixels (optional) | 512 x 3072 | |
Digitising | Photon counting | |
Resolution of detail | < 60 nm | |
Modes of operating | 3D-CT, ROI and Radioscopy |